Download PDF Glow Discharge Processes: Sputtering and Plasma Etching By Brian Chapman
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Glow Discharge Processes: Sputtering and Plasma Etching By Brian Chapman
Download PDF Glow Discharge Processes: Sputtering and Plasma Etching By Brian Chapman
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- Sales Rank: #1166111 in Books
- Published on: 1980-09-25
- Original language: English
- Number of items: 1
- Dimensions: 9.47" h x 1.29" w x 6.44" l, 1.64 pounds
- Binding: Hardcover
- 432 pages
From the Publisher
Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applications--practical techniques diligently related to fundamentals. Subjects range from voltage, distributions encountered in plasma etching systems to plasma-electron interactions that contribute to sustaining the discharge.
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